"Ionization Cross Section Evaluation For Methane And Carbon Tetrafluoride Under Electron Impact Via Icsp-Ic Formalism"

Abstract

In this work, we present a theoretical investigation of the total ionization cross sections for methane (CH₄) and carbon tetrafluoride (CF₄) molecules due to electron impact over a wide range of incident energies, employing the Improved Complex Scattering Potential – Ionization Contribution (ICSP-IC) method. The ICSP-IC approach, a refinement of the CSP-ic model, provides a semi-empirical framework to estimate ionization cross sections by incorporating target-specific electronic excitation properties and inelastic scattering parameters.

Methane and CF₄ are important in a variety of scientific and technological contexts, including low-temperature plasma processing, semiconductor etching, atmospheric modeling, and radiation chemistry. Accurate knowledge of their ionization cross sections is crucial for modeling electron-driven processes in these environments. The calculations span from ionization threshold energies up to several keV and are benchmarked against available experimental data and other theoretical models where possible.

The results show consistent physical behavior, with good agreement in peak positions and magnitudes of ionization cross sections. The study demonstrates the utility and reliability of the ICSP-IC method in modeling electron impact ionization of small polyatomic molecules and provides a valuable contribution to databases needed in plasma physics, environmental studies, and applied molecular collision theory.